The FR3200 released by Olympus Integrated Technologies America Inc. is a 200- and 300-mm wafer-inspection and automated defect-review system that integrates broadband deep-UV (DUV) technology for improved material contrast and characterization on advanced films and materials. The multiple-band optics provide imaging in single or combined UV and DUV bands. Observation techniques include bright- and dark-field, differential interference contrast, confocal, and UV and multiband UV, allowing the user to observe inspection points and defects under a wide variety of optics, magnifications and illumination. A tracking laser autofocus keeps the wafer focused, and images are displayed in a live video window and automatically captured and stored.

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