FEI Co.’s DualBeam Quanta 3-D field emission gun combines ion and electron optics with environmental scanning electron microscopy technology for 3-D nanoscale characterization, analysis and prototyping. The device operates in three modes, including high-vacuum (2.9 nm at 1 kV), low-vacuum (2.9 nm at 3 kV) and environmental scanning electron microscopy (1.5 nm at 30 kV). A 65-nA ion beam current enables users to reveal the subsurface structures and features of samples with site-specific cross sections. A 200-nA electron beam current enables high-throughput spectroscopy. It operates at relative humidity levels up to 100% and at temperatures up to 1500 °C.

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