The JSM-7001F is a thermal field emission analytical scanning electron microscope (SEM) that acquires high-resolution micrographs at up to 1,000,000× for low accelerating voltage x-ray spectroscopy and crystallography applications below the 100-nm scale. Manufactured by JEOL USA Inc., it has an in-lens field emission gun that delivers >200 nA of beam current to the sample. The small probe diameter enables characterization of nanostructures with 1.2-nm resolution at 30 kV. The specimen chamber accommodates samples of up to 200 mm in diameter and a variety of detectors. A choice of three stage sizes and exchange chambers as well as a five-axis automated stage are offered.

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