A helium-ion microscope has been unveiled by Carl Zeiss SMT Inc. The Orion scanning ion microscope uses a beam of helium ions to image and measure, an approach that offers high resolution and an extended depth of focus. The microscope has a field of view from 1 mm to 100 nm and magnification from 100 to 1 million. The ion beam is <1 nm at 1 pA, with a beam current from 1 fA to 25 pA. The helium gas field ion source has a lifetime >1000 h.

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