A software package for 3-D analysis has been released by Hitachi High-Technologies Corp. for use on its S-3400N and S-3700N variable-pressure scanning electron microscopes. Together with the instruments’ five-segment solid-state backscattered detector, the user can produce, manipulate and record 3-D visualizations of a specimen and make comprehensive measurements of its characteristics. The software collects four independent images from individual segments of the detector and calculates height information from their differences. Other parameters that can be measured include surface area and roughness. Mouse-controlled zoom and rotation of the 3-D image are provided.

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