The MicroVista-UV manufactured by Intevac Inc. is a back-illuminated CMOS camera optimized for ultraviolet response and suitable for low-light UV imaging applications such as microscopy, medical imaging, surface inspection, lithography and metrology. It has a 1280 × 1024-pixel format with 10.8-μm pitch, a 100% fill factor and high quantum efficiency resulting from proprietary antireflection coatings. It operates at 30 fps and provides full-frame 10-bit digital readout via a Camera Link interface. Operated at 130 fps, it provides 512 × 512-pixel resolution; at 1230 fps, it is 128 × 128. The system features passive air cooling, software-selectable region of interest and a C-mount lens. Nonlinearity is <2%, exposure time ranges from 33 μs to 1 s, and operating temperature is from 0 to 50 °C.

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