Suss MicroTec Inc. of Waterbury Center, Vt., a supplier of technology for the 3-D, microelectromechanical systems, advanced packaging and nanotechnology markets, has entered into a license agreement with Philips Research of Eindhoven, the Netherlands, for a new technology called substrate conformal imprint lithography. The aim of the collaboration is to bring to market an existing equipment platform with the added nanoimprinting feature, enabling new approaches to large-area imprint applications as well as improved printing resolution and repeatability.

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