A scanner that enables precision machining of lasers below 700 μm has been released by Neoteric Concepts LLC. Based on standard galvanometer motors, it uses refractive optics rather than mirrors to create a precise machining field. Accuracy and repeatability are <1 μm, and thermal drift is <0.05 μm/K. Drilling speed is >15,000 μm/s. The patent-pending scanner works with any laser from the UV to the far-IR, and an available option enables machining of inverse tapered features. Depending upon the refractive optics used, the scan field can be up to 500 × 500 μm, and the focal length can be $100 mm.

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