PI (Physik Instrumente) LP, a manufacturer of nanopositioning and precision motion-control equipment for photonics, semiconductor and life science applications, is offering a series of high-precision hexapod 6-axis alignment systems.

Standard PI hexapod systems provide 2- to 100-kg load capacity; custom systems with up to 1000-kg load capacity are available. In addition to positioning all axes with resolutions in the submicron and arc-second ranges, PI’s hexapods allow the user to define the center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command.

PI hexapods are driven by six high-resolution actuators (0.005-µm resolution for model M-850.11,) all connected directly to the same moving platform. The principle is similar to that seen in flight simulators, but considerably more precise. In place of the hydraulic actuators used there, the PI hexapods use custom high-load precision screws and servomotors or piezo actuators.

Applications include alignment and tracking of optics, electron beams, lasers, etc; satellite testing equipment; surgical robots; micromachining; micromanipulation (life sciences); x-ray diffraction measurements; semiconductor handling systems; tool control for precision machining and manufacturing; and fine positioning of active secondary mirror platforms in astronomical telescopes.

Features

• Six degrees of freedom
• Works in any orientation
• Load capacity to 2200 lbs
• No moving cables for improved reliability and precision
• Heavy-duty, ultrahigh-resolution bearings for 24/7 applications
• Repeatability to ±1 µm
• Actuator resolution to 0.005 µm
• Vacuum-compatible versions
• Linear and rotary multi-axis scans
• Virtualized center of rotation (pivot point)
• Sophisticated controller using vector algorithms
• 20,000-h mtbf (mean time between failures)

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