Polished Substrates
Ohara
CLEO/QELS 2007
Ohara makes precision polished quartz, fused silica and optical glass substrates. Its facility uses double-sided lapping and polishing machines to produce plano substrates with low surface roughness and flatness values. Class-100 cleanroom enviroments coupled with state-of-the-art megasonic and ultrasonic cleaning units allow Ohara to provide substrates that are ultraclean and that exhibit extrememly low particle counts. Some of the uses for our polished substrates include photomask substrates, TFT (thin film transistor-liquid crystal display) plates, phase masks and LCDs. Excellent metrology capabilities are on hand to provide complete polishing data with each shipment.