Ase Optics Inc. has developed a unique non-contact scanning metrology instrument capable of measuring the surface profile and optical thickness of 3-D objects at a spatial resolution of 25 µm and a measurement accuracy of 100 nm.

The instrument features a commercial Lumetrics OptiGauge that utilizes low coherence dual-wavelength interferometry technology originally invented at Eastman Kodak Co. to simultaneously measure the optical thickness of all layers within multilayer materials.

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