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ARTICLE OF THE HOUR Excimer Optics
High Power Demands High Reliability
The excimer laser’s shift to commercial applications has created a demand for higher power levels and increased reliability from the laser itself, thus creating a greater demand for industrialized optics to control, redirect, reshape and focus the intense UV radiation produced. The first high-reflectance mirror coatings for the UV and vacuum UV (VUV) were of the Al + MgF2 type produced in the late 1950s. Coatings of this design are still used today for multigas cavity mirrors and many...

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