Definition of Zerodur

Photonics Dictionary

Zerodur: Zerodur is a type of glass ceramic material known for its exceptional thermal and mechanical properties, particularly its low coefficient of thermal expansion (CTE) close to zero. It was developed by Schott AG, a German glass manufacturer, in the 1960s.

The name Zerodur is derived from its properties: "zero" refers to its nearly zero thermal expansion, and "dur" stands for durability. This combination of properties makes zerodur highly suitable for applications requiring dimensional stability over a wide range of temperatures.

Key characteristics of Zerodur include:

Low thermal expansion: Zerodur exhibits an extremely low coefficient of thermal expansion, nearly zero over a wide temperature range. This property makes it highly resistant to thermal fluctuations and minimizes the risk of deformation or warping due to temperature changes.

High homogeneity: Zerodur is manufactured with high precision and exhibits excellent homogeneity in its material properties, such as refractive index and thermal expansion coefficient, throughout the bulk material.

High thermal conductivity: Zerodur has relatively high thermal conductivity compared to other glass ceramics, allowing it to dissipate heat efficiently and minimize temperature gradients within the material.

Chemical stability: Zerodur is chemically stable and resistant to corrosion from acids, alkalis, and other chemicals, making it suitable for use in harsh environments.

Zerodur is widely used in various demanding optical and precision engineering applications, including:

Astronomical mirrors: Zerodur is a preferred material for manufacturing large astronomical telescope mirrors due to its stability and low thermal expansion, which minimize distortion caused by temperature changes.

Semiconductor lithography: Zerodur is used in the production of photomasks and reticles for semiconductor lithography, where precise dimensional control is critical for maintaining pattern accuracy.

Precision instruments: Zerodur is used in precision measurement instruments, such as interferometers and laser systems, where stability and accuracy are essential.

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Ohara Corp. - Optical Glass, Polish substrates 10-23