BOC Edwards Donates Dense Fluid Processor to MassNanotech

BOC Edwards, a supplier of vacuum, abatement, chemical management equipment and services to semiconductor OEMs and fabs, announced today it has donated a DFP 200 dense fluid processor high-precision advanced wafer chamber system and associated pumps, valves and other components to the MassNanoTech Institute, the University of Massachusetts Amherst’s campus-wide initiative for nanoscale science and engineering. The donation will be used to support the institute's educational and research programs under the auspices of the Center for Hierarchical Manufacturing. One of the institute's goals is to fabricate new nanoscale devices and collaborate with industry in the development of prototypes and new technology. The equipment will assist in its R&D programs on moving nanotechnology from the laboratory to manufacturing, said James Watkins, the institute's director.