Sensor systems

A 13-page brochure titled “Capacitive Displacement Sensors — Nanometrology Solutions” is available from !%PI (Physik Instrumente) LP%! in pdf or in print. The publication details the company’s offerings, including the D-510 PISeca single-electrode capacitive sensors for subnanometer precision measurements, the E-852 PISeca signal conditioner electronics for single-electrode capacitive sensors, and the E-509.E3 three-channel sensor module with additional servocontrollers for piezo positioning systems. Capacitive two-plate position sensors also are detailed. The measurement of vibration, flatness and thickness is discussed in an applications overview. A tutorial and a glossary are provided.