SemiProbe Installs Probe System at VTT

Probing and inspection system developer SemiProbe Inc. has installed its 200-mm Fully Automatic Electro-Optical Probe System at VTT Technical Research Centre of Finland Ltd., a primary research and technology organization in Europe.

VTT has silicon photonics design and foundry capabilities and will use the system to perform automatic and simultaneous electro-optical tests at wafer level. These tests support VTT’s silicon photonic volume production activities and offer advanced electro-optical test services to other users. SemiProbe built the system using their patented probe system for life PS4L architecture. Using PS4L technology, customers can easily re-configure the system to add new modules and accessories as requirements change. These changes are made via field upgrades and are a fraction of the cost in comparison to purchasing a new system.

This FA-8 Fully Automatic Electro-Optical Probe System consists of four multi-axis programmable manipulators that provide automatic fiber optic alignment and electrical contact. Two of the manipulators are six-axis SmarAct Hexapods with unique fiber and height measurement capabilities. The other two programmable three-axis manipulators provide nm-accuracy, repeatability and resolution specifications.

“We are excited to use the cassette-to-cassette automatic PS4L probing station where we contribute our unique fiber probing and alignment know-how,” said Giovanni Delrosso, senior scientist and project manager at VTT's photonics integration team in Espoo, Finland.

“In the past few years, silicon photonics [have] been one of the fastest growing areas at VTT,” said Timo Aalto, team leader at VTT. “In 2016, we delivered thousands of silicon photonics chips for our customers, and, in 2018, the targeted volume of tested chips is over one million. Electro-optical wafer-level tests [are] therefore vital in our R&D and manufacturing value chains.”

SemiProbe Inc. is a developer of probing and inspection systems for the semiconductor industry. VTT Technical Research Centre of Finland is a state-owned and controlled nonprofit limited liability company established by law and operating under the ownership steering of the Finnish Ministry of Employment and the Economy.