MEMS DEVICES

Micro-Optomechatronics describes devices for MEMS technology that are created through the fusion of optics, electronics and mechanics. Part of the “Optical Science and Engineering” series, the 320-page resource shows how the devices are classified based on the control methods of power and position of the laser beam. It examines flying heads, sampled servo systems, a laser sensor with a composite cavity, and optical disk drives and their focusing and tracking servo mechanisms. Laser oscillation and the Maxwell and wave propagation equations are covered in a discussion on theoretical background. The influence of nanotechnology and near-field optical mem-ory, and the dynamics of elastic beams, fluid and microsize objects are addressed. Hiroshi Hosaka et al; Marcel Dekker Inc., New York, 2005; $129.95.