BOC Edwards, Aviza to Collaborate on Atomic Layer Deposition

BOC Edwards and Aviza Technology Inc. today announced a joint development agreement to develop atomic layer deposition (ALD) technology for advanced semiconductor manufacturing. The companies said the collaboration will utilize BOC Edwards’ expertise in chemical precursor formulation and Aviza’s ALD hardware technology to optimize deposition processes for high-k materials and metals. BOC Edwards said its new line of Flex-ALD precursors will be evaluated as part of the agreement before its full commercial release. Aviza, based in Scotts Vallye, Calif., is a supplier of semiconductor equipment and process technologies for semiconductor, compound semiconductor, nanotechnology and related markets. It makes single-wafer and batch ALD platforms used in DRAM, flash and logic device applications, including the Celsior single-wafer ALD system. UK-based BOC Edwards, a supplier of technology, equipment and support services to the electronics and microelectronics industries, has North American headquarters in Wilminton, Mass.