Device Maker Orders Olympus Inspection System

Olympus Integrated Technologies America (ITA), a San Jose, Calif.-based subsidiary of Olympus Corp. of Japan, said it has received its fourth order from a US integrated device manufacturer for additional 300-mm wafer inspection and defect review systems and an FR3200 automated defect review system. Its AL3100 system will continue to provide 300-mm macro- and micro-wafer inspection, defect review, wafer ID verification and wafer sorting. The systems perform a variety of inspection and defect review tasks for semiconductor manufacturing processes.