THIN-FILM DEPOSITION

A two-page brochure on the XTC/3 thin-film deposition controller has been released by Inficon. The downloadable document notes that the device for rate and thickness control is available in a single-layer model that supports up to nine films, two sensors and two sources, and in a multiple-layer version, supporting up to 99 processes, 999 layers, 32 films, two sensors and two sources. Among the features listed, the device supports Crystal 12, Crystal Six and dual sensor automatic switching, and its ModeLock technology prevents film thickness errors caused by mode hopping. Specifications for both models are provided, including measurement interval and frequency change measurement resolution.