NTT Photonics Orders Aixtron CCS Reactor

Aixtron AG of Aachen, Germany, a provider of deposition equipment to the semiconductor industry, announced it received an order for one Close Coupled Showerhead (CCS) 3 x 3 in. flip-top MOCVD system from NTT Photonics Laboratories in Japan during the second quarter of 2007. The system, to be installed in NTT Photonics Laboratories' cleanrooms, will be used to develop indium phosphide (InP) -based devices. Hiroaki Takeuchi, executive manager of the Advanced Optoelectronics Laboratory at NTT Photonics, said the MOCVD system "will give us the process flexibility, good uniformity in thickness, doping, and composition we need for developing next-generation optical and microelectronic devices."