Zygo's Display Orders Top $7M

Zygo Corp.'s Metrology Div. announced yesterday orders from the flat panel display industry exceeding $7 million for its OneShot and ClearShot process control products. The orders were from multiple fabs and spread equally between the two products.

"We are pleased with the positive response our new ClearShot product has received from our display customers," said Brian Monti, senior vice president and general manager of Zygo's Display Solutions business unit. "Combined with our established OneShot tool, we are enthusiastic about the ability of both products to deliver yield-enhancing solutions to our customers."

OneShot is a color filter metrology tool used for process analysis and in-line control of critical manufacturing processes like one-drop fill. Since introduction, Zygo has installed over 60 OneShot tools in LCD fab applications, ranging in size from G3-G8. Initially used for photo-spacer height measurement and feed-forward control of the ODF (one drop fill) process, the product use has expanded to include the simultaneous measurement of other key parameters such as film thickness, critical 2-D dimensions, and vertical alignment features.

ClearShot performs 2-D and 3-D review of yield-robbing particles in the cell process, improving the efficiency of repair equipment that eliminates these particles from the process. The tool operates as an in-line review tool, accepting and acting upon automated optical inspection information to review and sort out particles that will damage the panel (killer defects) from those that will have no quality impact. These "judgment rules" allow panel makers to enhance the throughput of their production lines, and enable the use of fewer repair tools.

Zygo supplies optical metrology instruments, precision optics, and electro-optical design and manufacturing services to the semiconductor capital equipment and industrial markets. For more information, visit: www.zygo.com