OPTICAL LITHOGRAPHY

The 532-page volume Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a theoretical and practical treatment of semiconductor lithography for students and researchers. It comprises 10 chapters, each with a set of problems. Among the topics covered are optics (imaging and thin-film interference effects), photoresist chemistry (chemical reactions, diffusion and development phenomena), lithography as a manufacturing process (process and critical dimension control) and resolution enhancement technologies. Chapters also address aerial image formation and imaging in resist, including standing waves and swing curves. Charts, diagrams, references, appendixes and an index are provided. Chris Mack; John Wiley & Sons Ltd., Chichester, UK, 2007; $80, paperback; $200, hardcover.