Zygo Sells New Defect Printability System to Sematech
MIDDLEFIELD, Conn., March 25 -- Zygo Corp. reports that International Sematech has purchased its new DPS-310 series of inspection/review tools that incorporate TINT Virtual Stepper Mask Defect Analysis software. The software enables customers to examine a photomask for defects during the mask certification process. Customers will be able to identify nuisance OPC-induced defects detected by automatic inspection systems, and determine the impact of mask defects upon process windows and CD control.
The DPS-310 will be delivered to RAVE LLC, an advanced reticle repair tool manufacturer being sponsored by International Sematech to develop the next generation repair tool. This system will be used to verify that the photomask repairs are successful and will not be printed on the wafers.
LATEST NEWS
- Exail Signs LLNL Contract, Partners with Eelume
Apr 26, 2024
- Menlo Moves U.S. HQ: Week in Brief: 4/26/2024
Apr 26, 2024
- Optofluidics Platform Keys Label-, Amplification-Free Rapid Diagnostic Tool
Apr 25, 2024
- DUV Lasers Made with Nonlinear Crystals Enhance Lithography Performance
Apr 25, 2024
- Teledyne e2v, Airy3D Collaborate on 3D Vision Solutions
Apr 24, 2024
- One-Step Hologram Generation Speeds 3D Display Creation
Apr 24, 2024
- Innovation Award Winners for Laser Technology Honored in Aachen
Apr 23, 2024
- Intech 2024: AI Arrives on the Shop Floor
Apr 22, 2024