Hexapod positioners

A brochure titled “Hexapod 6-Axis Precision Parallel Kinematics Systems” is available from !%PI (Physik Instrumente) LP%!. Downloadable from the company’s Web site, the 20-page document presents a variety of standard and custom hexapod positioners and robots that feature submicron resolution and load capacities from 2 to 1000 kg. The standard hexapod designs range from servomotor-driven systems for moving optics up to 1 m in diameter to piezo-based designs for nanometer precision control of semiconductor wafers and masks. Specifications, diagrams and applications are provided for models such as the F-206.S HexAlign six-axis precision alignment system/manipulator. Related articles on the technology are included.