Wafer Bonding Shipment
Wafer bonding and lithography equipment
supplier !%EV Group%! of St. Florian, Austria, has shipped two wafer bonding systems
to the University of Michigan’s Lurie Nanofabrication Facility, a center for
microelectromechanical systems (MEMS) and microsystems research and a member of
the National Nanotechnology Infrastructure Network. The new systems will provide
high-force wafer bonding capabilities to increase the level of the university’s
MEMS research efforts.
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