Lithography System Order

Pennsylvania State University of University Park has ordered Vistec Lithography Inc.’s EBPG5200 electron-beam lithography system for the National Science Foundation’s National Nanotechnology Infrastructure Network so as to support advanced nanotechnology research nationwide. The system will be installed at the university’s new Millennium Science Complex. Vistec, of Watervliet, N.Y., is a provider of electron-beam lithography equipment based on shaped-beam technology.