MEMS Inspection

!%Rudolph Technologies Inc.%! of Flanders, N.J., a provider of process characterization equipment and software for wafer fabs and advanced packaging facilities, has announced that Fraunhofer Institute for Silicon Technology (ISIT) in Itzehoe, Germany, has placed an order for an NSX series macro inspection system for advanced microelectromechanical systems (MEMS) processing. The system was due to be installed this summer in the state-of-the-art 200-mm MEMS pilot production line at ISIT. With this order, the installed base of the NSX systems totals more than 600 worldwide.