Gigaphoton Confirms Debris Mitigation Technology

Based in Oyama, Japan, !%Gigaphoton Inc.%!, a lithography light source manufacturer, has confirmed its original technology for mitigating debris with magnetic fields for laser-produced plasma (LPP) light sources. It plans to push forward with a mass-production model in the beginning of 2012. Gigaphoton has been working since 2002 on the development of LPP light sources for extreme-UV lithography in pursuit of higher output and better cost of operation.