Rudolph Acquires NanoPhotonics

!%Rudolph Technologies Inc.%! of Flanders, N.J., a maker of process control metrology systems used in semiconductor device manufacturing, has acquired NanoPhotonics GmbH of Mainz, Germany, to strengthen its presence in the high-growth advanced packaging market. While specific terms of the deal were not disclosed, Rudolph said the all-cash transaction used less than 5 percent of its cash on hand, which totaled almost $174 million at the end of March 2012. The US company said that the acquisition expands its product offerings into unpatterned wafer and mask blank inspection markets and enhances its capabilities in all-surface inspection.