Powerlase Photonics Installs Laser for EUV in Japan

Laser maker Powerlase Photonics Ltd. has installed a high-power, high-energy laser developed for industrial applications at the Tokyo Institute of Technology in Japan, where it will be used in research on extreme-ultraviolet (EUV) light.

The 1.6-kW IR (1064 nm) laser, which can supply pulse energy in excess of 250 mJ with a repetition rate up to 20 kHz, was developed primarily for use in the materials processing and microelectronics industries, Powerlase said. But Tokyo Institute of Technology professor Kazuhiko Horioka will use the laser in his research on the generation of EUV light.

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