Microtechnology Emerging as Next Big Thing

Growing demand for high-tech research and development in micro-optoelectromechanical systems (MOEMS) has led to breakthrough achievements for applications including space exploration, wireless systems and health care.

“Recent demands for… miniature components for optical communication, digital imaging, sensors and actuators, wireless systems, and adaptive optics that are low-cost with high performance and high reliability have led researchers to consider batch processing in high-cleanroom environments to be the only solution,” said Ed Motamedi, of Revoltech Microsystems, adding that MEMS, MOEMS and micro-optics “all have a foundation of integrated circuits and involve batch processing in cleanrooms.”

Related breakthrough achievements are detailed by SPIE in a newly introduced section of its journal Micro/Nanolithography, MEMS, and MOEMS, called Emerging MOEMS Technology and Applications.

“The section includes outstanding new results in commercial research and development in photonics where micro-optics and MEMS are merged and innovative breakthrough devices come to light,” Motamedi said.

This new section presents emphasis on new technologies that are suited to meet current and future needs in the industry. Amid papers and studies, topics featured include digital micromirror devices, microscanning, adaptive optics, 3-D profiling, focusing micromirrors, Fabry-Perot filters, and micromachined spectrum analyzers.

Technical MOEMS developments for applications in robotics, remote chemical detection and identification, telescopes, bioimaging for clinical use, 3-D imaging and optical communications also are emerging.

For more information, visit: www.spie.org.