SUNY Poly, GlobalFoundries Partner for Patterning Center

The State University of New York Polytechnic Institute (SUNY Poly) and GlobalFoundries of Santa Clara, Calif., have announced a new Advanced Patterning and Productivity Center (APPC) located at SUNY Poly’s Colleges of Nanoscale Science and Engineering (CSNE).

The $500 million R&D program will accelerate next-generation chip technology in support of Governor Andrew Cuomo’s mission to further New York’s presence in global nanotechnology R&D. The five-year program will accelerate the introduction of extreme-ultraviolet (EUV) lithography technologies into manufacturing. The center will be anchored by a network of international chip, material and equipment suppliers, including IBM Corp. and Tokyo Electron Ltd., and generate 100 jobs.

“With the recent acquisition of IBM Microelectronics, GlobalFoundries has gained direct access to IBM’s continued investment in world-class semiconductor research and has significantly enhanced its ability to develop leading-edge technologies," said Dr. Gary Patton, chief technology officer and senior vice president of R&D at GlobalFoundries. "Together with SUNY Poly, the new center will improve our capabilities and position us to advance our process geometries at 7 nm and beyond.”

The center aims to bring mask and materials suppliers together to extend the capabilities of EUV lithography through exploring fundamental aspects of the patterning process. Other projects will be focused on enhancing productivity in preparation for implementing EUV lithography in the manufacturing of leading-edge products in GlobalFoundries’ production facility in Malta, N.Y. Through the APPC, members will have access to SUNY Poly’s patterning infrastructure, which includes state-of-the-art film deposition and etch capability, leading-edge patterning systems, EUV mask infrastructure and world-class EUV imaging capabilities.

SUNY Poly offers undergraduate and graduate degrees in nanoscience, nanoeconomics, engineering, cybersecurity, computer science and engineering, among others.

GlobalFoundries is a full-service semiconductor foundry, providing advanced technology and manufacturing in three continents.