Oxford Instruments Installs ITRI's Plasma Etch Equipment

Oxford Instruments Nanotechnology Tools Ltd. has installed plasma etch equipment in the applications laboratory of the Industrial Technology Research Institute (ITRI) in Taiwan.

This installation further enhances the existing etch and deposition capabilities already provided by Oxford Instruments at the facility. The PlasmaPro 100 Cobra and PlasmaPro 100 Polaris ICP etch tools were installed to focus on the optoelectronic, wide bandgap discrete device and sensors markets.

“As a company, we are dedicated to delivering process solutions to our customers,” said Ian Wright, Oxford Instruments Plasma’s vice president of sales and service for Asia. “These new tool installations show our commitment to achieving this for our Asian customers and complement our existing plasma etch and deposition systems already established in ITRI, enabling us to deliver efficient local service to our Asian markets. Our customers have the added benefit of full support from our dedicated applications team based in Taiwan ensuring a fast response to customer enquiries.”

These recent improvements to the ITRI laboratory continue the two organizations’ research-based collaboration agreement, with Oxford Instruments providing a research center staffed by process engineers from ITRI to the benefit of the extensive Asian customer base.

The process lab is currently performing process research and is ready to receive customer samples.