Zygo Reports OEM Contract for Position Feedback System

MIDDLEFIELD, Conn., June 28 -- Zygo Corp. has won an OEM contract for the ZMI 510 Position Feedback System. Zygo will supply a solution made up of an interferometer and optical components to a major supplier of defect review and surface metrology equipment. The ZMI 510 enhanced the throughput and performance of the supplier's defect review and metrology equipment by allowing the stage to be positioned with greater precision than the previous feedback mechanism. This reduced the search time for the correct features in the system's field of view, said Zygo.
We are pleased with the continued growth of the ZMI business in the semiconductor industry, said Brian Monti, vice president of sales and marketing for Zygo. This important new OEM win is a further indication of the growing market preference for Zygo Corporation's differentiated displacement measurement technology and of the effectiveness of our systems integration expertise and support in this area.
Shipments of the wafer platform will begin in July, Zygo said. More shipments are expected as the supplier's product becomes more prevalent.