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NEC Develops Next-Generation Process

Photonics Spectra
Aug 2001
NEC Corp. of Tokyo and its subsidiary NEC Electronics Inc. of Santa Clara, Calif., have developed a next-generation basic process module for consumer electronics, trunk transmission equipment and Internet servers. Four types of transistors based on the UX6 process module are planned.

The UX6 produces 65-nm logic gates and offers 1.0-V transistor operation. It is enabled by the use of 193-nm ArF photolithography, a silicon oxynitride film formation process and an intermetal film with a dielectric constant of less than 2.4.

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