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IQE Silicon Compounds Purchases Aixtron's SiGe Tricent Cluster Tool

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AACHEN, Germany, Aug. 8 -- IQE Silicon Compounds, a provider of epitaxial services to the silicon semiconductor market in Europe, has partnered with Aixtron for the development of specific SiGe epitaxy processes. The company has purchased Aixtron's recently introduced SiGe Tricent cluster tool. Within this alliance Aixtron will deliver and install the SiGe Tricent Cluster Tool in IQE Silicon Compounds' epi-facility in Cardiff, UK. The cluster tool, equipped with the SiGe Tricent epi module and a wafer-cleaning module, can comprise up to four individual process modules attached to a central...Read full article

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    Published: August 2001
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