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Cymer Installs 200th European DUV Unit

Photonics.com
Sep 2001
SAN DIEGO, Sept. 26 -- Cymer Inc. said that it has installed its 200th DUV excimer light source in Europe. The ELS-6000 was installed late second quarter and is currently in production at a major chipmaker's fab in Dresden, Germany.

Brian Klene, Cymer's senior vice president of marketing and business development, noted, "Shrinking design rules and increasing device complexity resulting from new materials have created new manufacturing challenges. As chipmakers' requirements become increasingly stringent, we want them to know they can rely on Cymer to help them deliver the most advanced semiconductor devices to the marketplace. Our commitment to the semiconductor industry has been unique, and has enabled our customers to maintain continuous productivity gains by shrinking the chip size. We intend to remain the key to our customers' future competitiveness."


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