FREMONT, Calif., Dec. 19 --Therma-Wave Inc. has signed a definitive agreement to acquire Sensys Instruments Corp. Upon consummation of the transaction, which is subject to various conditions including approval by Sensys shareholders, Sensys will become a wholly owned subsidiary of Therma-Wave, focusing primarily on integrated metrology. The transaction will involve the exchange of shares of common stock of Therma-Wave and, under certain circumstances, cash and promissory notes of Therma-Wave. The transaction is expected to close early in the first quarter of 2002. 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