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Alluxa - Optical Coatings LB 8/23

Deposition Systems: Meeting the Demands

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Vacuum deposition equipment must produce coatings with greater precision and uniformity.

Dr. Des Gibson

The key to growing the market for vacuum deposition equipment is in meeting the demands that drive it: higher throughput, enhanced automation and more precise control of layer thickness. The focus of these demands includes dense wavelength division multiplexers (DWDMs), phase-corrective coatings and gain-flattening filters. Filter manufacturers want deposition equipment that can control layer thickness to less than ±0.01 percent and that can coat wafers with diameters greater than 6 in. — even up to 12 in. — with uniformity of less than ±0.02 to 0.1 percent....Read full article

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    Published: January 2002
    CoatingsCommunicationsFeaturesindustrial

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