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Can Calcium Fluoride Handle New Demand?

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Daniel C. McCarthy

Although the demand for semiconductor lithography equipment decreased in the past year, system manufacturers struggled to advance their technology closer to the 193-nm and 157-nm nodes. For calcium fluoride (CaF2) suppliers, that climate put the emphasis on performance and quality, rather than on yields and quantity. With signs of a possible recovery later this year, however, that could change, and the availability of CaF2 could again become an issue. The slowdown in the semiconductor industry influenced capacity buys of CaF2 lens materials, but not technology buys, because lithographers...Read full article

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    Published: May 2002
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