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JMAR Signs With SG Cowen Securities

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SAN DIEGO, Dec. 11 -- JMAR Technologies Inc. has signed an agreement with SG Cowen Securities Corp. to assist in commercializing its collimated plasma lithography (CPL) systems. Under a series of contracts funded by the US Defense Advanced Research Projects Agency, JMAR demonstrated a laser-produced plasma source capable of creating 1 nm, "soft" x-ray light for semiconductor photolithography, which is undergoing functional testing and operator training at its San Diego facility. The CPL source will then be integrated with an x-ray stepper at JMAR's JSAL facility in Burlington, Vt., followed...Read full article

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    Published: December 2002
    defenseindustrialNews & Features

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