Therma-Wave Inc., a Fremont, Calif.-based maker of process control metrology systems used in the manufacture of semiconductors, announced it has received a multimillion dollar, multiple-tool order for its Opti-Probe RT/CD systems for multiple locations of a major semiconductor manufacturer. The systems will be used for real-time monitoring of critical dimensions for various process layers in volume production.. . .Agilent Technologies Inc. has appointed Koh Boon Hwee to its board of directors. He is an executive director of MediaRing Ltd., a Singapore-based communications company involved in Internet telephony technology, and Tech Group Asia, a manufacturer of plastic tools and components for the electronics and medical industries. He is also chairman of Singapore Airlines and on the board of US-based BroadVision Inc.. . .Elgar Electronics Corp., maker of programmable power supplies, has hired Philip Joosten as director of international sales and business development.