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Prototype of MEMS-Based 320 x 240 Uncooled IR Detector Demonstrated

Photonics Spectra
Jun 2003
MEMS-Based Uncooled IR Detector Using an array of heat-sensitive microscopic cantilever elements on its surface, a new MEMS-based detector, developed by Sarcon Microsystems of Knoxville, Tenn., and Sarnoff Corp. of Princeton, N.J., captures images at 320 x 240 pixels. A prototype of the proprietary IR detector engine was demonstrated at SPIE AeroSense in Orlando, Fla., and the companies expect the detectors to ship in the first quarter of 2004.

This development brings mechanically active MEMS technology to uncooled IR imaging. These new devices will be integrated into uncooled IR cameras used in monitoring manufacturing processes and in security and surveillance systems that require night vision.

array of heat-sensitive microscopic cantilever elementsdefenseimages at 320 x 240 pixelsindustrialMEMS-based detectorResearch & TechnologySarcon MicrosystemsSarnoffSensors & DetectorsTech Pulse

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