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ASM, U. of Helsinki to Research Atomic Layer Deposition

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BILTHOVEN, the Netherlands, August 27 --- ASM International NV, a manufacturer of equipment and materials used to produce semiconductor devices, announced it will make a long-term cooperative agreement with the University of Helsinki to jointly develop atomic layer deposition (ALD) technology, beginning in November. As part of this agreement, ASM intends to relocate its Espoo, Finland, research and development activities to the nearby campus of the University of Helsinki. ALD technology deposits single atomic layers on semiconductor wafers one at a time at low temperatures. The process is...Read full article

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    Published: August 2003
    ALDASM Internationalatomic layer depositionBasic ScienceindustrialNews & Featuressemiconductor devicesUniversity of Helsinki

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