ANDOVER, Mass., Oct. 1 -- MKS Instruments has acquired Wenzel Instruments, a Danish company that makes gauges, transducers and instrumentation for vacuum pressure measuring and controlling. Terms of the transaction were not disclosed.
MKS makes systems that analyze and control gases during semiconductor manufacturing and other industrial processes. The acquisition expands its vacuum-gauging technology portfolio with microelectromechanical system (MEMS)-based technology that includes a new generation of solid state MEMS-based vacuum sensors for applications such as loadlock control in gas-based manufacturing processes in the semiconductor, flat panel and data storage, biotech and pharmaceutical markets.
"Most vacuum gauges on the market today are based on technology developed decades ago," said Bill Stewart, vice president and general manager, MKS vacuum products group. "Today's advanced manufacturing processes require process control sensors with higher accuracy and faster response in a smaller footprint. By acquiring innovative micromachined Pirani and Piezo electric transducer technology, we are expanding our vacuum-gauge product line offering to meet these demands."
The acquisition allows MKS to augment its HPS product line with a piezo sensor for atmosphere sensing and an ultracompact MicroPirani solid-state thermal conductivity vacuum gauge for rough to medium vacuum measurement. The small size of the MicroPirani sensor allows it to be integrated with the solid-state piezo sensor, creating a dual sensor transducer capable of measuring a wide dynamic range from above atmospheric pressure to high vacuum. MKS has also integrated the MEMS sensors into some of its advanced instrumentation products.
For more information, visit: www.mksinst.com