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New Light Wave Measurements Most Precise Ever

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GAITHERSBURG, Md., March 12 -- New measurements of key wavelengths of ultraviolet light -- down to a few millionths of a nanometer -- are among the most precise ever reported and are improving calibrations of microlithography tools used in making integrated circuits, such as those in computer chips. The dimensions involved are 10,000 times smaller than hydrogen atoms, the smallest of all atoms. To make the measurements, physicists at the National Institute of Standards and Technology (NIST) used a spectrometer so sophisticated that it is one of only five of its kind in the world, two of which...Read full article

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    Published: March 2004
    Glossary
    microlithography
    A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.
    industrialintegrated circuitsLambda PhysikmicrolithographyNational Institute of Standards and TechnologyNews & FeaturesNISTspectroscopyultraviolet light

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