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Rocky Mountain Instruments - Custom Assemblies LB

MICROLITHOGRAPHY

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Part of the Tutorial Texts in Optical Engineering series, Optical Imaging in Projection Microlithography is an integrated mathematical view of the physics and numerical modeling of optical projection lithography. Offering a system-level survey of the parameter tolerances required in manufacturing, the 273-page volume discusses aberrations, variabilities, oblique rays, numerical computation, basic electromagnetism, resolution and image enhancement, imaging of extended objects with finite sources, and elements of diffraction theory and geometrical optics. Technologists can gather general...Read full article

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    Published: June 2005
    Glossary
    microlithography
    A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.
    BreakthroughMediaindustrialmicrolithographyNew Mediaoptical projection lithographySPIE Press

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