Suss MicroTec, a German manufacturer of precision lithography for the microelectronics and nanodevice markets, said it has received an order for its MA200Compact high-precision production mask aligner, used for photolithography work, from a major Japanese manufacturer of microelectromechanical systems (MEMS) components. . . . Photonics products supplier Melles Griot, of Carlsbad, Calif., announced it has signed an agreement to distribute some of Coherent's laser measurement and control (LMC) products, including power, energy and wavelength measuring instrumentation. . . . Telops, a Quebec maker of aerospace and defense systems, has made an agreement with GTDS Inc., a Montreal provider of marketing and sales services to the defense and security fields, to market its defense products in Europe, Japan and Australia. The agreement covers Telops' field-portable imaging radiometric spectrometer technology (FIRST), a sensor optimized to provide spatial information about the spectral characteristics of infrared targets, and its MR300 high-speed radiometric spectrometer, for measuring the spectral signature of rocket motors, planes, helicopters, ships, ground vehicles and other moving targets.