Search
Menu
Gentec Electro-Optics Inc   - Measure With Gentec Accuracy LB

Excimer Laser Produces Nanobump Arrays

Facebook X LinkedIn Email
Daniel S. Burgess

Two-dimensional arrays of 260-nm-diameter silicon bumps have been fabricated by exposing 1-μm-diameter polystyrene beads on silicon wafers to ultraviolet radiation from a KrF laser. Researchers at East China Normal University in Shanghai and at Data Storage Institute in Singapore suggest that the ability to produce such nanobump arrays may have applications in the production of high-density integrated circuits and data storage media. Exposing 1-μm-diameter polystyrene beads to 248-nm radiation from an excimer laser yields regular arrays of 260-nm-diameter silicon bumps. Courtesy...Read full article

Related content from Photonics Media



    Articles


    Products


    Photonics Handbook Articles


    White Papers


    Webinars


    Photonics Dictionary Terms


    Media


    Photonics Buyers' Guide Categories


    Companies
    Published: July 2005
    Glossary
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    Featuresnanosilicon bumpsTwo-dimensional arraysultraviolet radiationLasers

    We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.